Fab.nano is the shared fabrication facility at MIT where users carry out controlled processing of micro- and nanoscale structures. We oversee space and equipment in three locations:
- In Building 12 (map), the fab comprises nearly 50,000 square feet of Class 100/1,000/10,000 cleanroom, occupying the first and third floors of MIT.nano. There are also packaging and other capabilities in the fifth-floor prototyping space.
- Building 39 (map) facilities consist primarily of three cleanroom labs—ICL, TRL, and EML—offering varying degrees of flexibility and cleanliness levels.
- Building 24 (map) is home to the electron-beam lithography (EBL) facility.