Standard Operating Procedures

Lab Documentation

MIT.nano Policy and References

MIT.nano Wet Chemical Training Course Material

MIT.nano Spin Coaters and Chemicals

Tool and Instrument Procedures

Tool Name (link to SOP)Process CategoryTool Location
Acid-Etch-General-U10WetU10
Acid-Etch-General-L06WetL6
Acid-Extended-U07WetU7
ALD-Plasma-Arradiance-NitridesDeposition ChemicalU8
ALD-Plasma-Arradiance-XTDPDeposition ChemicalU8
Asher-Barrel-ThierryEtchU6
Asher-Chuck-ESIEtchL6
CoatDevelop-picoTrackLithoL8
Coldplate-SolventLithoL10
Diesaw-DAD3240PackagingLevel 5
DirectWrite-MLA150-OptAFLithoL8
DRIE-SPTS-PegasusEtchU6
DRIE-STS-MMPLEXEtchU6
EBeam-AJADeposition PhysicalU8
EBL-Elionix-HS50LithoL14
Ellipsometer-Semilab-SE2000MetrologyUpper Common Aisle
GB_SpincoaterDeposition ChemicalU2 Glovebox
HMDS-YES-U10LithoU10
Microscope-200mmMetrologyLower Common Aisle
Microscope-InspectMetrologyUpper Common Aisle
Microscope-QuickVisionMetrologyLevel 5
PECVD-Samco-PD220Deposition ChemicalU8
PECVD-STS-MMPLEXDeposition ChemicalU8
RIE-2Chamber-AMAT-P5000EtchL6
RIE-Cl2-Samco-200iPEtchU6
RIE-F-Samco-230iPEtchU6
RIE-Mixed-SAMCO-230iPEtchU6
RTA-1100C-ASMicroDiffusionL2
RTA-1100C-ASOne150DiffusionL2
RTA-1300C-ASOne150DiffusionL2
RTA-1300C-ASOne150-5GasDiffusionL2
Sputter-AJA-LLDeposition PhysicalU8
Vacuum-OvenDiffusionU4
VaporEtch-XeF2EtchU4
Wirebond-Ball-MEIPackagingLevel 5