Standard Operating Procedures

Lab Documentation

MIT.nano Policy and References

MIT.nano Wet Chemical Training Course Material

MIT.nano Spin Coaters and Chemicals

Tool and Instrument Procedures

Tool Name (link to SOP) Process Category Tool Location
ALD-Plasma-Arradiance-XTDP Deposition ALD U8
Asher-Chuck-ESI Etch L6
CoatDevelop-picoTrack Litho L8
Coldplate-Solvent Litho L10
Diesaw-DAD3240 Packaging Level 5
DirectWrite-MLA150-OptAF Litho L8
DRIE-SPTS-Pegasus Etch U6
DRIE-STS-MMPLEX Etch U6
EBeam-AJA Deposition PVD U8
PECVD-Samco-PD220 Deposition CVD U8
PECVD-STS-MMPLEX Deposition CVD U8
RIE-2Chamber-AMAT-P5000 Etch L6
RIE-Cl2-Samco-200iP Etch U6
RIE-F-Samco-230iP Etch U6
RIE-Mixed-SAMCO-230iP Etch U6
RTA-1100C-ASMicro Diffusion L2
RTA-1100C-ASOne150 Diffusion L2
RTA-1300C-ASOne150 Diffusion L2
RTA-1300C-ASOne150-5Gas Diffusion L2
Sputter-AJA-LL Deposition PVD U8
VaporEtch-XeF2 Etch U4