Cleanroom Metrology

MIT.nano's cleanroom metrology toolset is built with rapid characterization or process inspection in mind and includes:

  • Optical and Contact Profilometry
  • Spectroscopic Ellipsometry 
  • Large area Atomic Force Microscopy
  • UV-VIS Optical characterization
  • Fluorimetry
  • Rapid electrical characterization such as 4 point probe and Hall effect measurement setups
  • Thin film stress measurement setups

Tool details can be found here

All active cleanroom users can request training or assisted use on the Metrology toolsets