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Titan Themis Z G3 Cs-Corrected S/TEM

The Thermo Fisher Scientific (TFS) Themis Z G3 aberration-corrected scanning transmission electron microscope (STEM) achieves < 0.6 Å resolution and is equipped with an optimized monochromator for < 30 meV energy resolution at 60 kV, a Gatan Continuum electron energy loss spectrometer and image filter, a TFS Super-X energy dispersive x-ray spectrometer system, a segmented STEM detector for fast DPC and iDPC imaging, a Lorentz lens, a 16 megapixel Ceta II camera with 300 fps capture rate, and a 4D STEM EMPAD camera. Single tilt, double tilt, and tomography holders are available. The instrument can be operated at 60, 200, and 300 kV for the flexibility to accommodate a range electron beam sensitive materials.  

  • 60 kV-300 kV operating range 
  • Piezoelectric stage for compensating drift and fine sample movements
  • Sub-1 Å imaging at 60 kV (particularly useful for 2D materials)
  • Monochromator with < 30 meV energy resolution in EELS (vibrational spectroscopy and automated alignment software)
  • Gatan Continuum spectrometer and imaging filter (atomic resolution chemical mapping with monochromated EELS) 
  • 4 quadrant EDS detector with separable signals from each detector (atomic resolution elemental mapping with energy-dispersive X-ray spectroscopy (EDS))
  • Imaging and EDS tomography to reconstruct structure and chemistry in 3D
  • Thermo Fisher Scientific EMPAD detector with > 1,000 pattern/s capture rate for 4D STEM
  • Fast 4k x 4k CMOS camera (up to 300 frames per second at 512x512)
  • Segmented diode detector for fast mapping of electromagnetic fields (differential phase contrast) and light elements (integrated differential phase contrast)
  • Magnetic domains imaging via Lorentz lens settings 
  • Compatibility with a wide range of accessory in-situ holders (not yet available)
  • Custom Python interface
  • Atomic-resolution imaging and spectroscopy 
  • Correlating morphology, structure, and chemistry
  • Magnetic nanostructure characterization
  • Tomography for imaging and 3D elemental Distributions
  • Elemental and chemical analyses of small analytical volumes

MIT.nano (basement level)
60 Vassar Street (rear)
Cambridge, MA


  Self Use 
Staff Assisted 
MIT Academics    87.50 147.00
Other Academics 125.00 210.00
External                375.50 630.00
Reservation Rules

Prior electron microscopy imaging experience is required to become an independent user


Aubrey Penn, PhD           
Building 12 (basement)            
60 Vassar Street            
Cambridge, MA                   


Anna Osherov, PhD
MIT.nano (5th floor)
60 Vassar Street (rear)
Cambridge, MA