Oxford Ultim Max EDS operation basics

Ultim Max 100, for Energy Dispersive Spectrometry (EDS) system was recently installed on the Gemini 450 SEM at MIT.nano.

The Ultim Max system features Silicon Drift Detector (SDD) with a 100 mm² window and is designed to maximise sensitivity and spatial resolution. 

Main specifications of Oxford Ultim Max 100 EDS and AZtecLive:

• High speed SDD Dectector (No LN2 required)
• Energy resolution: Less than 127 eV (at Mn Ka)
• Detector area: 100 mm² 
• Element detection range: Be(4) – Am(95)
• Maximum input count rate: > 150 kcps
• Software: Qualitative or Quantitative Analysis
• Analysis Modes:  Point, Circle, Polygon, Line Scan, Mapping
• Live data processing

In this workshop, Warren Moberlychan from Oxford Instruments will cover the basic AZtec and AZtecLive software capabilities.

Zoom details will be shared with the registered users.