The Sigma HD VP SEM, from Zeiss, is a variable pressure field emission scanning electron microscope. The instrument combines high resolution imaging with the capability to perform advanced analytics while maintaining flexibility and ease-of-use.
- Magnification: x12-1M
- Acceleration Voltage: 0.1-30kV
- Probe current: 3pA-40nA
- 5 Axis Motorized Stage: X=125 mm, Y=125 mm
Detectors
- Everhart Thornley Secondary Electron Detector
- Inlens Secondary Electron Detector
- Inlens Energy Selective Backscatteres Electron Detector (EsB)
Imaging Modes
- High Vacuum (HV) mode – standard mode for analyzing conductive specimens.
- Variable Presurre (VP) mode – beneficial for imaging non-conductive specimens without additional specimen preparation. The partial pressure in the chamber is between 5 – 30Pa.
Please make sure to acknowledge MIT.nano Characterization in any publication, presentations, and patents involving results originated from the use of the Sigma HD VP SEM at MIT.nano Characterization Focus Facilities or through assistance from MIT.nano staff.
Suggested language: "This work was performed in part in the MIT.nano Characterization Facilities"
Zeiss Sigma 300 SEM
Gemini 450 SEM
Hitachi Regulus 8100 SEM
Only qualified users can reserve and use the instrument. The reservations are limited to 6 hr instrument time.
12-0191
MIT.nano (basement level)
60 Vassar Street (rear)
Cambridge, MA