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Zeiss Sigma 300 SEM

The Sigma 300 SEM, from Zeiss, is a field emission scanning electron microscope. The instrument is located in the lower level cleanroom of MIT.nano and offers a superior low kV performance approaching 1.5 nm at 1kV. 

 

Specifications/Capabilities
  • Magnification: x10-1M
  • Acceleration: Voltage 0.02-30kV
  • Probe current: 3pA-20nA
  • 5-axes motorized eucentric specimen stage (X,Y=130mm, Z=50mm, T=-3deg-70deg, R-360deg)

Detectors

  • Everhart Thornley Secondary Electron Detector
  • Inlens Secondary Electron Detector
sigma
Location

MIT.nano lower level cleanroom 16L (1110FD)
60 Vassar Street (rear)
Cambridge, MA

Rates/$
  Self Use 
($/hr)
Staff Assisted 
($/hr)
MIT Academics    60.20 137.50
Other Academics 86.00 196.00
External                214.50 588.00

 

* Introductory rates valid for 2020

Reservation Rules

Obtaining access to the cleanroom is a prerequisite for SIGMA 300 SEM training and usage

 

Staff/Contact

Anna Osherov, PhD
12-5005                        

Paul Tierney                            
12-0184                    

CONTACT

James M. Daley
39-421

ASSISTED USE TRAINING REQUEST

UPCOMING TRAININGS