MIT.nano's cleanroom metrology toolset is built with rapid characterization or process inspection in mind and includes:
- Optical and Contact Profilometry
- Spectroscopic Ellipsometry
- Large area Atomic Force Microscopy
- UV-VIS Optical characterization
- Fluorimetry
- Rapid electrical characterization such as 4 point probe and Hall effect measurement setups
- Thin film stress measurement setups
All active cleanroom users can request training or assisted use on the Metrology toolsets
