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FIB-SEM VELION

VELION is a FIB-SEM instrument dedicated to nanofabrication where Focused Ion Beam (FIB) technology has matured into state-of-the-art instrumentation for nanofabrication and rapid prototyping. VELION comprises a top down mounted nanoFIB column perpendicular to a Laser Interferometer Stage with an attached FE SEM column. The instrument offers unique capabilities and is highly optimized for fabricating high resolution, 2D and 3D nanostructures.

VELION is currently on DEMO at MIT.nano.

Specifications/Capabilities

nanoFIB column:

  • Liquid Metal Alloy Ion Sources (LMAIS) providing Wien filtered ions for Gallium-free patterning (Au, Ge, Si)
  • High resolution patterning capabilities (min feature size < 15nm for Au/Si)
  • Fully corrected write fields (distortion, stigmation)
  • Long term current stability (up to days)

Laser Interferometer stage:

  • Mechanical movement at 1nm precision
  • Continuous stage modes for stitch free FIB patterning on full 4”wafer scale
  • Stitching and overlay accuracy:  < 50 nm (|mean|+3·sigma)

FE SEM

  • Process control for rapid prototyping

Additional Capabilities:  

  • Automated height sensing to detect sample surface height variation for automated correction
  • Pt GIS deposition
  • Nanomanipulator
  • Raith Nanosuite software incl. CAD (GDSII) navigation & patterning

 

    Applications
    • Plasmonic devices
    • meta materials
    • Localized Ion implantation
    • Nanophotonics
    • Waveguides
    • Fresnel lenses
    • Nanofluidics
    • Nanopore fabrication on waferscale
    • Large area FIB hard masking
    • Ga-free TEM-L prep
    Location

    12-0189
    MIT.nano (basement level)
    60 Vassar Street (rear)
    Cambridge, MA

    Rates/$
      Self Use 
    ($/hr)
    Staff Assisted 
    ($/hr)
    MIT Academics    81.90 141.40
    Other Academics 117.00 202.00
    External                351.00 606.00

     

    * Introductory rates valid for 2020

     

    Reservation Rules

    Prior electron microscopy imaging experience is required to become an independent user

    Staff/Contact

    Yang Yu, PhD
    Raith Application Scientist

    ASSISTED USE / TRAINING REQUEST

    Anna Osherov, PhD
    12-5005
    MIT.nano (5th floor)
    60 Vassar Street (rear)
    Cambridge, MA

    CONTACT